Experimental Thermal–Fluidic System Integration
Integrated and operated a rotating quartz-tube RF plasma reactor with gas flow control, vacuum interface, electrode configuration, and rotational drive. Developed operational procedures and interface verification steps to ensure stable ignition, controlled shutdown, and repeatable plasma processing runs.
System Overview
RF plasma reactor with rotational drive, vacuum interface, and controlled gas path.
- Quartz-tube plasma reactor with rotational drive and furnace heating
- RF electrode coupling and grounding configuration
- Hydrogen and argon gas flow control with vacuum stabilization
Interface Checks
Electrode spacing and electrical isolation verified prior to plasma ignition.
- Verified mechanical alignment and electrode clearance
- Prevented unintended grounding paths and RF short circuits
- Improved system stability and repeatability during plasma operation
Operational Procedure Development
Public excerpt from authored SOP for repeatable plasma system operation.
- Authored SOP for system startup, gas stabilization, and pre-run verification
- Defined RF ignition sequence and safety checks
- Documented shutdown procedures for repeatable plasma processing runs